Some people put them in the dishwasher, some clean them in sink, some soak them in vinegar, some use ultrasonic cleaning devices……. I just boil mine on the stove.
At last count I have about 20 reusable nebulizer sets to go with the 5 portable compressors that I keep in various places around the house and in my cars. Most of these nebulizers are several years old and have been hundreds, if not thousands, of times but still nebulize fairly well. In addition, I probably have a case or more of the disposable types, which Ive acquired during previous hospitalizations. I keep those as a back ups.